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Chemical Delivery

CHEMGUARD® Gen III Model CG350 Automated Chemical Refill System W/Opt. eV Heating NEW: The 3rd Generation of the CHEMGUARD is here! The CHEMGUARD CG350 is a dual tank liquid refill (DTLR) cabinet designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. CHEMGUARD has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes…

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CHEMGUARD® GenIII Controller Retrofit The next generation of controller technology platforms! Upgrade to the CHEMGUARD Gen III Controller for enhanced reliability, configurability and extend the life of your capital investment.

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VAPORGUARD Temperature Control System The VAPORGUARD® Temperature Control System is our next-generation controller that provides accurate and stable temperature control for chemicals. It is available in six different models (providing temperature control ranging from 10-115°C.)

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CHEMGUARD® GENIII CG010 Series Automated Chemical Refill System Designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs, the CHEMGUARD 10 Series are single tank, ultra high purity (UHP) cabinets (STLR’s) designed to help reduce your capital costs while maximizing uptime. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a…

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CHEMGUARD® GENIII CG050 High Flow Bubbler The CHEMGUARD CG050 is an automated high flow bubbler designed to support EPI manufacturing with for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner. The CG050 bubbler can be…

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CHEMGUARD® GEN III BCD 100-200 Bulk Automated Chemical Delivery Systems The CHEMGUARD Gen III BCD 100 and 200 chemical delivery systems are single-reservoir bulk cabinets designed for fabwide distribution allowing 100% tool uptime. Class I, Division II compliant, the BCD is designed for difficult chemistries in difficult environments. Versum Materials' patented ultrasonic technology lets you completely empty the reservoir to help eliminate expensive chemical waste. Years of experience goes into all of our high purity chemical delivery…

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CHEMGUARD® GENIII 100-426 Series Automated Chemical Delivery Systems Our CHEMGUARD Gen III 100-426 Series Automated Chemical Delivery Systems are dual-reservoir cabinets (DTLR) designed for 100% uptime in order to meet the demanding needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner. Each cabinet is fully…

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CHEMGUARD® GENIII 500 Automated Chemical Refill System with Solvent Purge Our CHEMGUARD Gen III 500 is a dual-reservoir (DTLR) system with automated solvent purge for low volatility chemicals. Dual precursor tanks allow for 100% uptime to meet the needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-efficient manner.…

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CHEMGUARD® 1000-2000 Automated Chemical Refill Systems Our CHEMGUARD 1000 and 2000 models are single tank liquid refill systems (STLRs) designed to work with quartz host ampoules and Source Controller Modules (SCMs) to provide 100% tool uptime. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-efficient manner. CHEMGUARD 1000 and…

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