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Cleaning Systems

S-1088 Exhausted Line Rinse Station The Versum Materials Model S-1088 is a self-contained, fully automatic system designed to clean stainless steel exhaust lines, and other FAB parts with a user programmable DIW and acid blend.

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S-1702 Etch Parts Cleaner The Versum Materials Model S-1702 is a self-contained, fully automatic system designed to acid etch and rinse quartz chambers, ceramic rings, shower heads and miscellaneous parts, using precise pre-programmed recipes. USER selectable acid spray and spray rinse cycles delivering uniform etching and complete rinsing.

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S-1087 Exhausted Work Station The Versum Materials S-1087 Exhausted Work Station is a self-contained, manual work station is designed to perform part cleans and rinses in an exhausted environment. The sink is fitted with two (2) fixed sprays bars, which can be operated by pushing the “spray bar on” button. A pneumatically operated drain valve will allow the operator to fill or dump the…

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TYPHOON™ S790 Quartzware Cleaner The Versum Materials TYPHOON Quartzware Cleaner is a self-contained system designed to automatically clean and rinse 200 or 300mm vertical furnace quartzware in a vertical all spray process. TYPHOON offers a faster and cleaner process with improved cost-of-ownership. The tool provides two process chambers with simultaneous independent operation.

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OMNI™ Quartzware Cleaner The Versum Materials OMNI Quartzware Cleaner is a self‐contained system designed to automatically clean and rinse 300mm (or smaller) vertical furnace quartzware in a vertical all spray process. OMNI features twin process chambers with engineered fixturing for tubes and liners in the right chamber, and multiple fixtures for all other quartz accessories in the left chamber on a rotating carousel.…

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FX-30 FOUP FOSB Cleaner The Versum Materials FX-30 FOUP/FOSB Cleaner is specifically engineered for 300mm FOUPs (Front Opening Unified Pods) and FOSBs (Front Opening Supply Boxes). The use of a solution isolation technology provides superior cleaning and drying performance in a compact unit.

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