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Airopak® F2/N2 10% Fluorine in Nitrogen Mixture – Commercial GradeVersum Materials has a long history as the world’s leading provider of Airopak® fluorine gas mixtures for surface modification of plastics and fluoropolymers. Airopak F2/N2 mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Versum Materials supplies 10% and 20% fluorine nitrogen (F2/N2) gas mixtures in individual cylinders and bulk tube trailers globally. Our expert technical…

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Airopak® F2/N2 20% Fluorine in Nitrogen Mixture – Commercial GradeVersum Materials has a long history as the world’s leading provider of Airopak® fluorine gas mixtures for surface modification of plastics and fluoropolymers. Airopak F2/N2 fluorine/nitrogen mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Versum Materials supplies 10% and 20% F2/N2 fluorine nitrogen gas mixtures in individual cylinders and bulk tube trailers globally. Our expert…

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Airopak® F2/N2 20% Fluorine in Nitrogen Mixture – Low Oxygen Concentration GradeVersum Materials has a long history as the world’s leading provider of Airopak® fluorine gas mixtures for surface modification of plastics and fluoropolymers. Airopak F2/N2 mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Versum Materials supplies 10% and 20% fluorine nitrogen (F2/N2) gas mixtures in individual cylinders and bulk tube trailers globally. Our expert technical…

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Octafluorocyclopentene C5F8Very large scale integration (VLSI) Grade Octofluorocyclopentene (99.99%) is our highest purity grade for semiconductor applications.  Octafluorocyclopentene is a toxic, non-flammable, low boiling point (81°F) colorless liquid with a slight distinctive odor.  

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Chlorine Trifluoride VLSIChlorine Trifluoride (ClF3) is a nearly colorless gas with an irritating odor similar to chlorine or mustard with an extremely low odor threshold.  This product configuration is only sold in Europe.

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Chlorine VLSIChlorine (CL2) is a toxic, corrosive, greenish-yellow gas that is irritating to the eyes and the respiratory system. This product is only sold in Europe.

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Trifluoromethane Halocarbon 23 VLSITrifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide. The product is also known as Halocarbon 23. Our R23 VLSI grade is only sold in Europe.

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Xenon DiFluoride ElectronicXenon Difluoride (XeF2) is a highly selective isotropic etching gas used in the MEMs market. Versum Materials offers a stable, low-cost supply of XeF2.

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Silicon Tetrafluoride VLSISilicon Tetrafluoride (SiF4) is a source of fluorine for processes requiring controlled concentrations of fluorine present to form low-k films.

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Trifluoromethane Halocarbon 23Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide. The product is also known as Halocarbon 23.

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