New GASGUARD® eV Temperature Control System from Versum Materials provides tighter, more precise control for heating electronic specialty gases during fabrication
Stand-alone, integrated system can improve reliability over designs that require third-party equipment
TEMPE, Ariz. (November 11, 2016) – Versum MaterialsTM, Inc. (NYSE:VSM) has introduced its new GASGUARD® eV Temperature Control System, which is designed to enhance fabrication consistency and lower the cost of ownership and operation by delivering reliable fabwide heat sourcing and control of electronic specialty gases that require heating to maintain or increase flow. It is engineered for delivery of gases such as NH3, CO2, SiH2Cl2, WF6, SiCl4, BCl3, HF, C4F6, HBr, CH3F or any liquefied compressed gas used during semiconductor fabrication and the manufacturing of TFT-LCDs and photovoltaics.
The GASGUARD eV Temperature Control System integrates the GASGUARD system’s trusted gas delivery technology with an ECC heater/controller, two blankets and two heat traces to deliver an integrated platform that can eliminate the concerns and time of specifying, installing and commissioning third-party equipment. The integrated system also allows fabs to scale their manufacturing with the assurance that the components of the delivery system will not need to be upgraded or replaced.
The GASGUARD eV system’s newly redesigned heater blanket has single-piece construction for both the heater and insulation, dual voltage (120V or 208-240V supply) and over-temperature protection reliability via redundant bimetallic switches for more precise delivery of heated gases to the fabrication tools.
Versum has expanded the integrated monitoring and control links between the heater/controller and AP11 controller to encompass benchmark gas delivery control that provides users with enhanced uptime, simplified troubleshooting and increased controller reliability.
The unit also has a single power feed (with an optional dual power source) and integrated GFRI protection to lower installation costs. Even with the additional functionality, the GASGUARD eV system features a reduced footprint that results in more usable floor space in the fab.
Available as either a single or multiple source system, the GASGUARD eV system has Class 1, Division 2, ATEX, CE, CSA approval as well as other certifications.
This is the newest member of the GASGUARD system line of gas delivery systems that includes automatic, semi-automatic and manual systems in a variety of configurations from a single-source system to a multiple-cylinder source and purge system. The different GASGUARD system models can accommodate a full range of hazardous gases: flammable, pyrophoric, corrosives, toxics and highly-toxics, all tailored to meet specific manufacturing needs.
About Versum Materials, Inc.
Versum Materials (NYSE: VSM) (versummaterials.com) is a best-in-class electronic materials company providing high-purity chemicals and gases, delivery systems, services and materials expertise to meet the evolving needs of the global semiconductor, display and LED markets. Derived from the Latin word for “toward,” the name “Versum” (pronounced ver-SOOM) communicates the company’s deep commitment to helping customers move toward the future by collaborating, innovating and creating cutting-edge solutions.
A global leader in technology, quality, safety and reliability, Versum is one of the world’s largest suppliers of next generation CMP slurries, ultra-thin dielectric and metal film precursors, formulated cleans and etching products, and delivery equipment that has revolutionized the semiconductor industry. Versum Materials operated for more than three decades as a division of Air Products. An independent company since October 2016, Versum has annual sales of about US$1 billion, 1,900 employees and 10 major facilities in Asia and the North America. It is headquartered in Tempe, Ariz.
Note: This press release contains “forward-looking statements” within the meaning of the safe harbor provisions of the U.S. Private Securities Litigation Reform Act of 1995. Forward-looking statements can be identified by references to future periods, and include statements we make about our ability to meet the anticipated needs of our customers and the industries we serve, and the expected performance and scalability of our products in specific customer environments with differing manufacturing needs, the ability to align our resources to meet the demands of the industries we serve, our future sales, the success of our planned strategy of moving our capabilities closer to our customers, and our prospects following the spin-off. These forward-looking statements are based on management’s reasonable expectations and assumptions as of the date of this release. Actual results and the outcomes of future events may differ materially from the those expressed or implied in the forward-looking statements because of a number of risks and uncertainties, including, without limitation, the general economic and business conditions that could decrease the demand for our goods and services; our concentrated customer base; our ability to continue technological innovation to meet the evolving needs of our customers; our substantial post-spin leverage; and other risk factors described in our filings with the Securities and Exchange Commission, including the amended Registration Statement on Form 10, and our Current Reports on Form 8-K filed since. Versum assumes no obligation to update any forward-looking statements or information in this release.