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Octafluorocyclopentene C5F8 Very large scale integration (VLSI) Grade Octofluorocyclopentene (99.99%) is our highest purity grade for semiconductor applications.  Octafluorocyclopentene is a toxic, non-flammable, low boiling point (81°F) colorless liquid with a slight distinctive odor.  

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Chlorine Trifluoride VLSI Chlorine Trifluoride (ClF3) is a nearly colorless gas with an irritating odor similar to chlorine or mustard with an extremely low odor threshold.  This product configuration is only sold in Europe.

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Chlorine VLSI Chlorine (CL2) is a toxic, corrosive, greenish-yellow gas that is irritating to the eyes and the respiratory system. This product is only sold in Europe.

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Tungsten Hexafluoride Semiconductor Tungsten Hexafluoride (WF6), Semiconductor grade (99.9%), is a toxic, corrosive, odorless, liquefied gas.

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Isotopically‐Enriched BF3 (Boron Trifluoride) ION‐X® Dopant Gas Storage and Delivery System Versum Materials and NuMat Technologies announce a global alliance to bring ION‐X sub‐atmospheric dopant gas storage and delivery system solutions to our worldwide customers. ION-X  is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at…

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AsH3 (Arsine) ION-X® Dopant Gas Storage and Delivery System Versum Materials and NuMat Technologies announce a global alliance to bring ION-X sub‐atmospheric gas storage and delivery system solutions to our worldwide customers.

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Trifluoromethane Halocarbon 23 VLSI Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide. The product is also known as Halocarbon 23. Our R23 VLSI grade is only sold in Europe.

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CHEMGUARD® GenIII Controller Retrofit The next generation of controller technology platforms! Upgrade to the CHEMGUARD Gen III Controller for enhanced reliability, configurability and extend the life of your capital investment.

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CMP Solutions Versum Materials' enhanced portfolio of offerings to the chemical mechanical planarization (CMP) market provides an integrated solution to our customers in the IC segment. To complement our CMP slurries, we also offer post-CMP cleaning products and our FlowMaster CMP Slurry delivery system.

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