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Local Trending Software for GASGUARD® AP11/Gen III ControllersThe “Local Trending” software option provides the operator with analog history. This software option is available on any AP11/Gen III Controllers from Versum Materials. This feature is retrofitable with the programmed software dongle installed in the controller and firmware upgrade. Allows the user to track any analog variable, such as delivery pressure, cylinder pressure or temperature over time. Time tracking…

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S-1088 Exhausted Line Rinse StationThe Versum Materials Model S-1088 is a self-contained, fully automatic system designed to clean stainless steel exhaust lines, and other FAB parts with a user programmable DIW and acid blend.

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S-1702 Etch Parts CleanerThe Versum Materials Model S-1702 is a self-contained, fully automatic system designed to acid etch and rinse quartz chambers, ceramic rings, shower heads and miscellaneous parts, using precise pre-programmed recipes. USER selectable acid spray and spray rinse cycles delivering uniform etching and complete rinsing.

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S-1087 Exhausted Work StationThe Versum Materials S-1087 Exhausted Work Station is a self-contained, manual work station is designed to perform part cleans and rinses in an exhausted environment. The sink is fitted with two (2) fixed sprays bars, which can be operated by pushing the “spray bar on” button. A pneumatically operated drain valve will allow the operator to fill or dump the…

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CHEMGUARD® Gen III Model CG350 Automated Chemical Refill System W/Opt. eV HeatingNEW: The 3rd Generation of the CHEMGUARD is here! The CHEMGUARD CG350 is a dual tank liquid refill (DTLR) cabinet designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. CHEMGUARD has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes…

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PH3 Phosphine ION‐X® Dopant Gas Storage and Delivery SystemVersum Materials and NuMat Technologies announce a global alliance to bring ION‐X sub‐atmospheric dopant gas storage and delivery system solutions to our worldwide customers. ION-X  is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at…

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QMAC® Quality Monitoring and Control Analytical SystemDeveloped for Ultra-High Purity Gases and Distribution Systems, the Versum Materials QMAC Quality Monitoring and Control Analytical System is a proven solution to enable successful semiconductor manufacturing by monitoring bulk and specialty gases impurities. The QMAC® Quality Monitoring and Control Analytical System integrates ultra-high purity analyzers to effectively sample ultra-high purity gases, such as nitrogen, oxygen, argon, helium and hydrogen.…

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Airopak® F2/N2 10% Fluorine in Nitrogen Mixture – Commercial GradeVersum Materials has a long history as the world’s leading provider of Airopak® fluorine gas mixtures for surface modification of plastics and fluoropolymers. Airopak F2/N2 mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Versum Materials supplies 10% and 20% fluorine nitrogen (F2/N2) gas mixtures in individual cylinders and bulk tube trailers globally. Our expert technical…

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Airopak® F2/N2 20% Fluorine in Nitrogen Mixture – Commercial GradeVersum Materials has a long history as the world’s leading provider of Airopak® fluorine gas mixtures for surface modification of plastics and fluoropolymers. Airopak F2/N2 fluorine/nitrogen mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Versum Materials supplies 10% and 20% F2/N2 fluorine nitrogen gas mixtures in individual cylinders and bulk tube trailers globally. Our expert…

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Octafluorocyclopentene C5F8Very large scale integration (VLSI) Grade Octofluorocyclopentene (99.99%) is our highest purity grade for semiconductor applications.  Octafluorocyclopentene is a toxic, non-flammable, low boiling point (81°F) colorless liquid with a slight distinctive odor.  

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