Isotopically‐Enriched BF3 (Boron Trifluoride) ION‐X® Dopant Gas Storage and Delivery SystemVersum Materials and NuMat Technologies announce a global alliance to bring ION‐X sub‐atmospheric dopant gas storage and delivery system solutions to our worldwide customers. ION-X is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at…
AsH3 (Arsine) ION-X® Dopant Gas Storage and Delivery SystemVersum Materials and NuMat Technologies announce a global alliance to bring ION-X sub‐atmospheric gas storage and delivery system solutions to our worldwide customers.
CHEMGUARD® GenIII Controller RetrofitThe next generation of controller technology platforms! Upgrade to the CHEMGUARD Gen III Controller for enhanced reliability, configurability and extend the life of your capital investment.
GASGUARD eV Temperature Control SystemThe Versum Materials GASGUARD® eV temperature control system delivers state‐of‐the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. This latest addition to our premier line of GASGUARD delivery systems and equipment includes an ECC heater/controller, the GASGUARD AP11 controller, and a gas cabinet with two blankets and two heat traces to accommodate…
CMP SolutionsVersum Materials' enhanced portfolio of offerings to the chemical mechanical planarization (CMP) market provides an integrated solution to our customers in the IC segment. To complement our CMP slurries, we also offer post-CMP cleaning products and our FlowMaster CMP Slurry delivery system.
TrimethylphosphateTrimethylphosphate (TMPO) is a liquid phosphorus source used in depositing PSG and BPSG films for semiconductor applications. TMPO is a high purity liquid precursor used in producing high quality dielectric films.
TrimethylphosphiteTrimethylphosphite (TMPI) is a liquid phosphorus source used with silicon sources such as TEOS to dope SiO2 in PSG and BPSG applications.
Trimethylsilane 3MS SemiconductorSemiconductor Grade Trimethylsilane (99.995%) is our standard high-purity offering for Low-k semiconductor applications. Trimethylsilane is a colorless, odorless, and highly-flammable gas.
Tungsten Hexafluoride MegaclassTungsten Hexafluoride (WF6), Megaclass grade (99.9995%), is our highest purity grade for silicon semiconductor metallization process applications, offering full metals analysis. Tungsten Hexafluoride is a toxic, corrosive, odorless, liquefied gas.