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Airopak® F2/N2 20% Fluorine in Nitrogen Mixture – Commercial Grade Versum Materials has a long history as the world’s leading provider of Airopak® fluorine gas mixtures for surface modification of plastics and fluoropolymers. Airopak F2/N2 fluorine/nitrogen mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Versum Materials supplies 10% and 20% F2/N2 fluorine nitrogen gas mixtures in individual cylinders and bulk tube trailers globally. Our expert…

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Octafluorocyclopentene C5F8 Very large scale integration (VLSI) Grade Octofluorocyclopentene (99.99%) is our highest purity grade for semiconductor applications.  Octafluorocyclopentene is a toxic, non-flammable, low boiling point (81°F) colorless liquid with a slight distinctive odor.  

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Isotopically‐Enriched BF3 (Boron Trifluoride) ION‐X® Dopant Gas Storage and Delivery System Versum Materials and NuMat Technologies announce a global alliance to bring ION‐X sub‐atmospheric dopant gas storage and delivery system solutions to our worldwide customers. ION-X  is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at…

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AsH3 (Arsine) ION-X® Dopant Gas Storage and Delivery System Versum Materials and NuMat Technologies announce a global alliance to bring ION-X sub‐atmospheric gas storage and delivery system solutions to our worldwide customers.

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CHEMGUARD® GenIII Controller Retrofit The next generation of controller technology platforms! Upgrade to the CHEMGUARD Gen III Controller for enhanced reliability, configurability and extend the life of your capital investment.

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GASGUARD eV Temperature Control System The Versum Materials GASGUARD® eV temperature control system delivers state‐of‐the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. This latest addition to our premier line of GASGUARD delivery systems and equipment includes an ECC heater/controller, the GASGUARD AP11 controller, and a gas cabinet with two blankets and two heat traces to accommodate…

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CMP Solutions Versum Materials' enhanced portfolio of offerings to the chemical mechanical planarization (CMP) market provides an integrated solution to our customers in the IC segment. To complement our CMP slurries, we also offer post-CMP cleaning products and our FlowMaster CMP Slurry delivery system.

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VAPORGUARD Temperature Control System The VAPORGUARD® Temperature Control System is our next-generation controller that provides accurate and stable temperature control for chemicals. It is available in six different models (providing temperature control ranging from 10-115°C.)

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Xenon DiFluoride Electronic Xenon Difluoride (XeF2) is a highly selective isotropic etching gas used in the MEMs market. Versum Materials offers a stable, low-cost supply of XeF2.

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