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GASGUARD® BULK eV Temperature Control System for Y-CylindersThe latest generation of smart manufacturing technology for heated gases – lowers cost of ownership, delivers higher flows, further enhances safety and reliability. The self-contained GASGUARD Bulk eV Temperature Control System for heating Y-Cylinders is being made available in two phases: First the ECC controller and, second, the new blanket. Modification is possible so that the system could also accommodate…

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GASGUARD® Active Control Phase 1Maintain, repeat and stabilize pressure for high vapor pressure gases under varying manufacturing conditions with zero drift. Our GASGUARD Active Phase I technology now allows semiconductor fabs to achieve much greater precision in controlling the pressure of high vapor pressure gases such as dopant gases, purge gases and high-pressure halocarbons (NF3, silane, N2O, CO2, CF4, etc.) during delivery to the…

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GASGUARD® LED Lighting – Solid State LED Lighting within the cabinet and controllerLED lighting within our GASGUARD gas cabinets and controller enhances the user experience during maintenance and troubleshooting. This option is only available with the GASGUARD AP11 Controller. Optional time values for auto-shutoff from 31-99 minutes. The standard setting is 99 minutes. Key LED Lighting Benefits: Enhanced visibility for inspections, cylinder changes, maintenance and operation Long lifespan Energy efficient Self-contained –…

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Local Trending Software for GASGUARD® AP11/Gen III ControllersThe “Local Trending” software option provides the operator with analog history. This software option is available on any AP11/Gen III Controllers from Versum Materials. This feature is retrofitable with the programmed software dongle installed in the controller and firmware upgrade. Allows the user to track any analog variable, such as delivery pressure, cylinder pressure or temperature over time. Time tracking…

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S-1088 Exhausted Line Rinse StationThe Versum Materials Model S-1088 is a self-contained, fully automatic system designed to clean stainless steel exhaust lines, and other FAB parts with a user programmable DIW and acid blend.

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S-1702 Etch Parts CleanerThe Versum Materials Model S-1702 is a self-contained, fully automatic system designed to acid etch and rinse quartz chambers, ceramic rings, shower heads and miscellaneous parts, using precise pre-programmed recipes. USER selectable acid spray and spray rinse cycles delivering uniform etching and complete rinsing.

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S-1087 Exhausted Work StationThe Versum Materials S-1087 Exhausted Work Station is a self-contained, manual work station is designed to perform part cleans and rinses in an exhausted environment. The sink is fitted with two (2) fixed sprays bars, which can be operated by pushing the “spray bar on” button. A pneumatically operated drain valve will allow the operator to fill or dump the…

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Vertical Furnace Quartzware Cleaner (VFQC)The Versum Materials Vertical Furnace Quartzware Cleaner (VFQC) is a self-contained system designed to automatically clean and rinse a full set of 300 mm (or smaller) vertical furnace quartzware with a combination of a spray and immersion process. The VFQC features twin process areas with engineered fixturing for tubes (outer tubes) and liners (inner tubes) on the twin Spider Stages…

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CHEMGUARD® Gen III Model CG350 Automated Chemical Refill System W/Opt. eV HeatingNEW: The 3rd Generation of the CHEMGUARD is here! The CHEMGUARD CG350 is a dual tank liquid refill (DTLR) cabinet designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. CHEMGUARD has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes…

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PH3 Phosphine ION‐X® Dopant Gas Storage and Delivery SystemVersum Materials and NuMat Technologies announce a global alliance to bring ION‐X sub‐atmospheric dopant gas storage and delivery system solutions to our worldwide customers. ION-X  is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at…

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