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Gas Delivery

GASGUARD® AP11 Controller Auto Recovery/Auto Restart The Auto Recovery System’s (ARS) main objective is to maintain safe gas delivery in an unexpected event. Keep process gas systems operating or returned to original settings; will not override safety alarms.  The GASGUARD AP11 is the only commercially available controller that has a second microprocessor as standard equipment for the ARS benefit.  

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GASGUARD® BULKGUARD™ Bulk Gases System Versum Materials' new bulk gases system - GASGUARD® BULKGUARD™ Bulk Gases System delivers maximum safety and reliability (100% uptime), lower cost of ownership, compatibility with many gases and flexible sources, flow rate scalability up to 1000 slpm and other advantages. It delivers state-of-the-art fabwide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. Versum…

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GASGUARD® BULK eV Temperature Control System for Y-Cylinders The latest generation of smart manufacturing technology for heated gases – lowers cost of ownership, delivers higher flows, further enhances safety and reliability. The self-contained GASGUARD Bulk eV Temperature Control System for heating Y-Cylinders is being made available in two phases: First the ECC controller and, second, the new blanket. Modification is possible so that the system could also accommodate…

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GASGUARD® Active Control Phase 1 Maintain, repeat and stabilize pressure for high vapor pressure gases under varying manufacturing conditions with zero drift. Our GASGUARD Active Phase I technology now allows semiconductor fabs to achieve much greater precision in controlling the pressure of high vapor pressure gases such as dopant gases, purge gases and high-pressure halocarbons (NF3, silane, N2O, CO2, CF4, etc.) during delivery to the…

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GASGUARD® LED Lighting – Solid State LED Lighting within the cabinet and controller LED lighting within our GASGUARD gas cabinets and controller enhances the user experience during maintenance and troubleshooting. This option is only available with the GASGUARD AP11 Controller. Optional time values for auto-shutoff from 31-99 minutes. The standard setting is 99 minutes. Key LED Lighting Benefits: Enhanced visibility for inspections, cylinder changes, maintenance and operation Long lifespan Energy efficient Self-contained –…

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Local Trending Software for GASGUARD® AP11/Gen III Controllers The “Local Trending” software option provides the operator with analog history. This software option is available on any AP11/Gen III Controllers from Versum Materials. This feature is retrofitable with the programmed software dongle installed in the controller and firmware upgrade. Allows the user to track any analog variable, such as delivery pressure, cylinder pressure or temperature over time. Time tracking…

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GASGUARD eV Temperature Control System The Versum Materials GASGUARD® eV temperature control system delivers state‐of‐the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. This latest addition to our premier line of GASGUARD delivery systems and equipment includes an ECC heater/controller, the GASGUARD AP11 controller, and a gas cabinet with two blankets and two heat traces to accommodate…

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GASGUARD Very High Flow System Our GASGUARD® Very High Flow systems are the benchmark for the safe and continuous delivery of large volumes of electronic specialty gases and materials. The new VHF is our fourth generation bulk system and delivers all of the advantages of the first three generations.

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GASGUARD® Acetylene Delivery Our GASGUARD Acetylene delivery system was designed for amorphous carbon hard mask (CHM) applications. For semiconductor device manufacturers in the DRAM and Flash Memory markets, the system will reduce operating costs, increase cylinder utilization, and improve both film quality and yields.

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GASGUARD AP11 Controller Our GASGUARD® AP11 controller is the latest generation of control technology for specialty gas delivery systems. The AP11 provides users with enhanced uptime, simplified troubleshooting and increased controller reliability. Benefits of the AP11 controller include: Uninterrupted gas supply while controller is in use; smart indicators for simplified monitoring; and a continued focus on reliability in the design and testing processes…

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