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GASGUARD® AP11 Controller Auto Recovery/Auto RestartThe Auto Recovery System’s (ARS) main objective is to maintain safe gas delivery in an unexpected event. Keep process gas systems operating or returned to original settings; will not override safety alarms.  The GASGUARD AP11 is the only commercially available controller that has a second microprocessor as standard equipment for the ARS benefit.  

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GASGUARD® BULKGUARD™ Bulk Gases SystemVersum Materials' new bulk gases system - GASGUARD® BULKGUARD™ Bulk Gases System delivers maximum safety and reliability (100% uptime), lower cost of ownership, compatibility with many gases and flexible sources, flow rate scalability up to 1000 slpm and other advantages. It delivers state-of-the-art fabwide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. Versum…

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Dynastrip™ DL88 Multipurpose Photoresist RemoverDynastrip DL88 is a uniquely formulated photoresist removal product designed specifically for wafer level packaging (WLP) applications including flip-chip bumping, redistribution, and wafer level CSP.

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Flipstrip Multipurpose Photoresist RemoverFlipStrip is a uniquely formulated chemistry designed specifically for the removal of processed photoresists used in flip-chip bumping applications. It is effective in both electroplated solder and in-situ paste processes.

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Dynastrip™ AP7900A Multipurpose Photoresist RemoverDynastrip AP7900A is a uniquely formulated photoresist remover designed specifically for stripping thick photoresist used in wafer level packaging (WLP) applications including lead-free solder bumping, µ-bumping, and Cu pillar processes

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Dynastrip™ 7700 Multipurpose Photoresist RemoverDynastrip 7700 is a uniquely formulated photoresist remover designed specifically for removing thick resist (dry film or liquid) used in wafer level packaging (WLP) including lead-free solder bumping, m-bumping and Cu pillar processes.

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GASGUARD® BULK eV Temperature Control System for Y-CylindersThe latest generation of smart manufacturing technology for heated gases – lowers cost of ownership, delivers higher flows, further enhances safety and reliability. The self-contained GASGUARD Bulk eV Temperature Control System for heating Y-Cylinders is being made available in two phases: First the ECC controller and, second, the new blanket. Modification is possible so that the system could also accommodate…

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GASGUARD® Active Control Phase 1Maintain, repeat and stabilize pressure for high vapor pressure gases under varying manufacturing conditions with zero drift. Our GASGUARD Active Phase I technology now allows semiconductor fabs to achieve much greater precision in controlling the pressure of high vapor pressure gases such as dopant gases, purge gases and high-pressure halocarbons (NF3, silane, N2O, CO2, CF4, etc.) during delivery to the…

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GASGUARD® LED Lighting – Solid State LED Lighting within the cabinet and controllerLED lighting within our GASGUARD gas cabinets and controller enhances the user experience during maintenance and troubleshooting. This option is only available with the GASGUARD AP11 Controller. Optional time values for auto-shutoff from 31-99 minutes. The standard setting is 99 minutes. Key LED Lighting Benefits: Enhanced visibility for inspections, cylinder changes, maintenance and operation Long lifespan Energy efficient Self-contained –…

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Local Trending Software for GASGUARD® AP11/Gen III ControllersThe “Local Trending” software option provides the operator with analog history. This software option is available on any AP11/Gen III Controllers from Versum Materials. This feature is retrofitable with the programmed software dongle installed in the controller and firmware upgrade. Allows the user to track any analog variable, such as delivery pressure, cylinder pressure or temperature over time. Time tracking…

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