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GASGUARD eV Temperature Control System

Delivery Systems & Services

The Versum Materials GASGUARD® eV temperature control system delivers state‐of‐the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. This latest addition to our premier line of GASGUARD delivery systems and equipment includes an ECC heater/controller, the GASGUARD AP11 controller, and a gas cabinet with two blankets and two heat traces to accommodate two A or B size cylinders, plus others are also available.

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