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OMNI™ Quartzware Cleaner

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The Versum Materials OMNI Quartzware Cleaner is a self‐contained system designed to automatically clean and rinse 300mm (or smaller) vertical furnace quartzware in a vertical all spray process. OMNI features twin process chambers with engineered fixturing for tubes and liners in the right chamber, and multiple fixtures for all other quartz accessories in the left chamber on a rotating carousel. User programming allows the operator to select inside and outside spray etching for the tubes and liners, and spray or injection cleaning for accessories.