Open Mobile Navigation

Products

Trifluoromethane Halocarbon 23 VLSI

Electronic Materials, Process Materials

Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide. The product is also known as Halocarbon 23. Our R23 VLSI grade is only sold in Europe.

Choose Your Location