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Delivery Systems & Services


Maximize uptime and peace of mind

Gas and Chemical Delivery Systems & Services for Fabs

You can depend on our delivery equipment to safely and reliably distribute gases and chemicals to your fab tools. Versum Materials’ equipment solutions are backed by decades of experience in the safe distribution of gases and chemicals. Our GASGUARD® and CHEMGUARD® delivery systems have been recognized as the industry standard for cost-effective, fabwide gas and chemical supply.


Our MEGASYS® Gas and Chemical Management service provide on-site, day‐to‐day management of gas and chemical supply by trained technicians from Versum Materials.  Your benefits can include:

  • Increased process reliability
  • Wafer yield improvement
  • Zero material run-outs

MEGASYS® lets you focus on what you do best by leaving the gas and chemical supply management to us.

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