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GASGUARD eV: Smart, Fabwide Heat Sourcing and Control for Electronic Specialty Gases

The GASGUARD® eV temperature control system now features remote-mount options, assuring continuous gas flow for safety and reliability.

Versum Materials, Inc. introduces our significantly upgraded GASGUARD eV temperature control system, with the addition of a remote-mount controller option. The system delivers smart, state-of-the-art heat sourcing and control of specialty gases that require heating before delivery to the tool in semiconductor manufacturing fabs.

The newly enhanced system lowers cost of ownership, improves uptime and simplifies troubleshooting with top and remote mount options and a smaller footprint. The fully certified, code-compliant eV model includes an electrochemical compression heater/controller and a gas cabinet with two 700-watt blankets and two heat traces to accommodate two A or B size cylinders. It also includes a GASGUARD AP11 controller, which provides integrated monitoring and control and offers a single power feed with optional dual power.

Our customers reported that GASGUARD eV temperature control technology provides steady and precise temperature and pressure control, enhanced Proportional, Integral, Derivative (PID) temperature control, overheating protection and continuous monitoring. Equally important, our system ensures an uninterrupted flow of gas with no temperature peaks and valleys

One-third of the gas delivery systems sold by Versum Materials use heating to flow low-temperature gases and the Company strives to improve the systems flexibility by “taking temperature control technology anywhere on the floor where it is needed.”

More than 60 years of experience backs GASGUARD gas and chemicals delivery systems for the semiconductor, thin-film-transistor (TFT) LCD and photovoltaics industry. These delivery systems include automatic, semiautomatic and manual versions in a variety of configurations—from a single source to a multiple cylinder source and purge system and can accommodate the full range of hazardous gases: flammable, pyrophoric, corrosive, toxic and highly-toxic, all tailored to meet specific manufacturing needs.

Built on a legacy of more than 30 years of manufacturing and supplying some 30,000 advanced materials and delivery systems, Versum Materials continues to design and build safer, more reliable delivery equipment for high-purity gas and liquid distribution.

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