Developing next-generation precursors
Versum Materials is uniquely positioned to support the market in the adoption of new precursors through our VMLaunch™ Experimental Products Program. Our VMLaunch™ Experimental Products Program has supplied more than 500 different chemistries in hundreds of container configurations with the appropriate purity and specifications to customers all over the world.
As the semiconductor industry continues to go beyond Moore’s law, the industry demands new precursor offerings to meet the performance and integration needs for advanced nodes. To successfully develop these materials, our customers seek partners with a proven track record of material development and process scale-up. With our expertise in materials handling, supply chain development, quality control, and container package design,
The VMLaunch™ Experimental Products Program enables our integrated device manufacturers (IDM), foundry, and original equipment manufacturers (OEM) partners to leverage our organizational resources to develop solutions to meet their technology roadmap requirements. The program’s top priority is to be a reliable partner in the supply of these chemistries while holding safety and quality to the highest standard. One of our OEM partners summarized this goal, “We can count on VMLaunch™ to deliver precursors for our development needs and transition this material to our HVM [high volume manufacturing] customers throughout the world.”
The delivery of high-purity precursors is achieved with the pairing of the right container. The VMLaunch™ Experimental Products Program allows for fast prototyping of container and level sense configurations customized to address specific delivery requirements. Container manufacturers may be able to offer a simple configuration, but with the complexity of these molecules, expert support is where the program excels. Working closely with R&D scientists, Versum Materials’ container engineers carefully review both the chemical properties and high-purity product flow to match the precursor to the optimal container configuration.
To find out more about our VMLaunch™ Experimental Products Program, please contact:
Katie Bruffett, Experimental Products Program Marketing Manager
In This Section
- Delivery Systems Manuals
- Versum Lab Notes
- Working with customers to develop new molecules
- Computational chemistry accelerates CVD or ALD precursors
- Establishing thermal stability of CVD and ALD precursors
- Low-k intermetal dielectrics
- Assay means purity, right?
- Digestive metal analysis methods for OM
- Advantages to all metal sealed containers
- Selecting a GASGUARD system for controlling heated specialty gases
- Developing next-generation precursors
- PDMAT for advanced technology nodes
- Delivery Systems and Safety
- Customer Resources
- Safety Data Sheets
- Supplier Information