Microelectromechanical Systems (MEMS)
Dependable materials. Reliable delivery systems.
For manufacturers in the Microelectromechanical Systems (MEMS) market, Versum Materials™ is now offering a stable, low-cost supply of XeF2. With a nearly 40-year history of fluorine expertise, we are ready to be your XeF2 supplier. We also provide materials for doping, etching, and thin film deposition, which coupled with our GASGUARD® Gas Delivery and CHEMGUARD® Chemical Delivery systems, cover your MEMS manufacturing needs covered.