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CHEMGUARD® Gen III Model CG350 Automated Chemical Refill System W/Opt. eV Heating NEW: The 3rd Generation of the CHEMGUARD is here! The CHEMGUARD CG350 is a dual tank liquid refill (DTLR) cabinet designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. CHEMGUARD has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes…

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Versum Materials Expands Manufacturing Capacity, Creates New Jobs TEMPE, Arizona, March 1, 2017--(BUSINESS WIRE)-- Versum Materials, Inc. (NYSE: VSM), a leading materials supplier to the semiconductor industry, announced today that it would expand its manufacturing capacity at its Delivery Systems and Service (DS&S) headquarters in Allentown, Pennsylvania. To support customer demand and the growth in its DS&S business, new positions will be created for highly skilled technicians, engineers, quality…

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Versum Materials Reaches Milestone with Installation of 200th CHEMGUARD® Gen. III Refill System TEMPE, Ariz. (January 6, 2017) – Versum Materials, Inc. (NYSE:VSM) The Delivery Systems and Services Group (DS&S) of Versum Materials, Inc. (NYSE: VSM) has realized an important milestone: the sale and commissioning of its 200th CHEMGUARD® Gen III high purity, liquid delivery system since the product line launched in early 2016. The 200 units are now running in the latest…

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VAPORGUARD Temperature Control System The VAPORGUARD® Temperature Control System is our next-generation controller that provides accurate and stable temperature control for chemicals. It is available in six different models (providing temperature control ranging from 10-115°C.)

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FLOWMASTER Chemical Delivery System The FLOWMASTER® Chemical Delivery System supplies precise blending and delivery of post-CMP rinse chemical. When integrated with the slurry delivery system the entire tool suite delivers a complete CMP chemical solution.

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FLOWMASTER CMP Slurry Delivery System Our FLOWMASTER® CMP Slurry Delivery System consistently blends and delivers CMP slurry. Redundant systems and a broad range of analytical capabilities help deliver the most uniform and accurate blend consistencies to the wafer.

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CHEMGUARD® GEN III BCD 100-200 Bulk Automated Chemical Delivery Systems The CHEMGUARD Gen III BCD 100 and 200 chemical delivery systems are single-reservoir bulk cabinets designed for fabwide distribution allowing 100% tool uptime. Class I, Division II compliant, the BCD is designed for difficult chemistries in difficult environments. Versum Materials' patented ultrasonic technology lets you completely empty the reservoir to help eliminate expensive chemical waste. Years of experience goes into all of our high purity chemical delivery…

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CHEMGUARD® GENIII 100-426 Series Automated Chemical Delivery Systems Our CHEMGUARD Gen III 100-426 Series Automated Chemical Delivery Systems are dual-reservoir cabinets (DTLR) designed for 100% uptime in order to meet the demanding needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner. Each cabinet is fully…

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CHEMGUARD® GENIII 500 Automated Chemical Refill System with Solvent Purge Our CHEMGUARD Gen III 500 is a dual-reservoir (DTLR) system with automated solvent purge for low volatility chemicals. Dual precursor tanks allow for 100% uptime to meet the needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-efficient manner.…

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CHEMGUARD® GENIII CG010 Series Automated Chemical Refill System Designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs, the CHEMGUARD 10 Series are single tank, ultra high purity (UHP) cabinets (STLR’s) designed to help reduce your capital costs while maximizing uptime. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a…

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