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Dopant gas storage and delivery Archive

Versum Materials to Exhibit at SEMICON Taiwan TEMPE, Ariz. (August 28, 2018) ‒ Versum Materials, Inc. (NYSE: VSM), a leading materials supplier to the semiconductor industry, announced today it will showcase its next-generation CMP slurries, ultra-thin dielectric and metal film precursors, formulated cleans and etching products, and delivery equipment at SEMICON Taiwan. The event takes place September 5-7, 2018 at the Taipei Nangang Exhibition Center in Taiwan.…

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PH3 Phosphine ION‐X® Dopant Gas Storage and Delivery System Versum Materials and NuMat Technologies announce a global alliance to bring ION‐X sub‐atmospheric dopant gas storage and delivery system solutions to our worldwide customers. ION-X  is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at…

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Isotopically‐Enriched BF3 (Boron Trifluoride) ION‐X® Dopant Gas Storage and Delivery System Versum Materials and NuMat Technologies announce a global alliance to bring ION‐X sub‐atmospheric dopant gas storage and delivery system solutions to our worldwide customers. ION-X  is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at…

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AsH3 (Arsine) ION-X® Dopant Gas Storage and Delivery System Versum Materials and NuMat Technologies announce a global alliance to bring ION-X sub‐atmospheric gas storage and delivery system solutions to our worldwide customers.

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