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dual-reservoir Archive

CHEMGUARD® Gen III Model CG350 Automated Chemical Refill System W/Opt. eV Heating NEW: The 3rd Generation of the CHEMGUARD is here! The CHEMGUARD CG350 is a dual tank liquid refill (DTLR) cabinet designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. CHEMGUARD has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes…

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CHEMGUARD® GENIII 500 Automated Chemical Refill System with Solvent Purge Our CHEMGUARD Gen III 500 is a dual-reservoir (DTLR) system with automated solvent purge for low volatility chemicals. Dual precursor tanks allow for 100% uptime to meet the needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-efficient manner.…

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CHEMGUARD® GENIII CG050 High Flow Bubbler The CHEMGUARD CG050 is an automated high flow bubbler designed to support EPI manufacturing with for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner. The CG050 bubbler can be…

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CHEMGUARD® GENIII 100-426 Series Automated Chemical Delivery Systems Our CHEMGUARD Gen III 100-426 Series Automated Chemical Delivery Systems are dual-reservoir cabinets (DTLR) designed for 100% uptime in order to meet the demanding needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner. Each cabinet is fully…

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