TYPHOON™ S790 Quartzware Cleaner The Versum Materials TYPHOON Quartzware Cleaner is a self-contained system designed to automatically clean and rinse 200 or 300mm vertical furnace quartzware in a vertical all spray process. TYPHOON offers a faster and cleaner process with improved cost-of-ownership. The tool provides two process chambers with simultaneous independent operation.
Xenon DiFluoride Electronic Xenon Difluoride (XeF2) is a highly selective isotropic etching gas used in the MEMs market. Versum Materials offers a stable, low-cost supply of XeF2.
OMNI™ Quartzware Cleaner The Versum Materials OMNI Quartzware Cleaner is a self‐contained system designed to automatically clean and rinse 300mm (or smaller) vertical furnace quartzware in a vertical all spray process. OMNI features twin process chambers with engineered ﬁxturing for tubes and liners in the right chamber, and multiple ﬁxtures for all other quartz accessories in the left chamber on a rotating carousel.…
Hexafluorobutadiene nCtrl Hexafluoro-1,3-butadiene (C4F6) is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.