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CHEMGUARD® Gen III Model CG350 Automated Chemical Refill System W/Opt. eV Heating NEW: The 3rd Generation of the CHEMGUARD is here! The CHEMGUARD CG350 is a dual tank liquid refill (DTLR) cabinet designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. CHEMGUARD has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes…

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Versum Materials to Exhibit Materials and Delivery Systems for Semiconductor Manufacturing at SEMICON Taiwan TEMPE, Ariz. (September 6, 2017) ‒ Versum Materials, Inc. (NYSE: VSM), Versum Materials, Inc. (NYSE: VSM), a leading materials supplier to the semiconductor industry, announced today it will showcase its next-generation CMP slurries, ultra-thin dielectric and metal film precursors, formulated cleans and etching products, and delivery equipment at the largest microelectronics event in Taiwan, SEMICON Taiwan. The event takes place…

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Versum Materials to exhibit materials and delivery systems for semiconductor manufacturing at SEMICON China TEMPE, Ariz. (March 9, 2017) ‒ Versum Materials, Inc. (NYSE: VSM), a leading materials supplier to the semiconductor industry, announced today it will showcase its next-generation CMP slurries, ultra-thin dielectric and metal film precursors, formulated cleans and etching products, and delivery equipment at the largest gathering of the semiconductor industry in the world, SEMICON China. The event takes place March…

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Versum Materials to exhibit materials and delivery systems for semiconductor manufacturing at SEMICON Korea TEMPE, Ariz. (February 6, 2017) – Now operating as a fully independent, publicly traded company, Versum Materials, Inc. (NYSE:VSM) will showcase its innovative products and services at SEMICON Korea, February 8-10, 2017, at the COEX Conference and Exhibition Center, Seoul. Exhibiting as Versum Materials Korea (Booth No. 1618, Hall C, 3F), the company plans on displaying two pieces of equipment…

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New GASGUARD® eV Temperature Control System from Versum Materials provides tighter, more precise control for heating electronic specialty gases during fabrication TEMPE, Ariz. (November 11, 2016) – Versum MaterialsTM, Inc. (NYSE:VSM) has introduced its new GASGUARD® eV Temperature Control System, which is designed to enhance fabrication consistency and lower the cost of ownership and operation by delivering reliable fabwide heat sourcing and control of electronic specialty gases that require heating to maintain or increase flow. It is engineered for delivery of…

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MEGASYS Services MEGASYS Gas and Chemical Services is the premier supplier of semiconductor fab and sub-fab services to the worldwide electronics industry, as part of a global operations infrastructure. We do this by working safely, executing flawlessly and adding value to advanced semiconductor facilities. We offer engineering solutions, maintenance activities and coordination of chemical, gas and advanced materials; training; safety; quality; and…

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GASGUARD Very High Flow System Our GASGUARD® Very High Flow systems are the benchmark for the safe and continuous delivery of large volumes of electronic specialty gases and materials. The new VHF is our fourth generation bulk system and delivers all of the advantages of the first three generations.

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GASGUARD® Acetylene Delivery Our GASGUARD Acetylene delivery system was designed for amorphous carbon hard mask (CHM) applications. For semiconductor device manufacturers in the DRAM and Flash Memory markets, the system will reduce operating costs, increase cylinder utilization, and improve both film quality and yields.

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GASGUARD AP11 Controller Our GASGUARD® AP11 controller is the latest generation of control technology for specialty gas delivery systems. The AP11 provides users with enhanced uptime, simplified troubleshooting and increased controller reliability. Benefits of the AP11 controller include: Uninterrupted gas supply while controller is in use; smart indicators for simplified monitoring; and a continued focus on reliability in the design and testing processes…

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GASGUARD Gas Delivery Systems Our GASGUARD® product line includes automatic, semi-automatic and manual systems in a variety of configurations, from a single-source system to a three-cylinder source system and purge system. The different models can accommodate a full range of hazardous gases: flammable, pyrophoric, corrosives, toxics and highly-toxics, all tailored to meet your needs.

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