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gas delivery Archive - Page 2

GASGUARD® Acetylene Delivery Our GASGUARD Acetylene delivery system was designed for amorphous carbon hard mask (CHM) applications. For semiconductor device manufacturers in the DRAM and Flash Memory markets, the system will reduce operating costs, increase cylinder utilization, and improve both film quality and yields.

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GASGUARD AP11 Controller Our GASGUARD® AP11 controller is the latest generation of control technology for specialty gas delivery systems. The AP11 provides users with enhanced uptime, simplified troubleshooting and increased controller reliability. Benefits of the AP11 controller include: Uninterrupted gas supply while controller is in use; smart indicators for simplified monitoring; and a continued focus on reliability in the design and testing processes…

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