QMAC® Quality Monitoring and Control Analytical System Developed for Ultra-High Purity Gases and Distribution Systems, the Versum Materials QMAC Quality Monitoring and Control Analytical System is a proven solution to enable successful semiconductor manufacturing by monitoring bulk and specialty gases impurities. The QMAC® Quality Monitoring and Control Analytical System integrates ultra-high purity analyzers to effectively sample ultra-high purity gases, such as nitrogen, oxygen, argon, helium and hydrogen.…
GASGUARD Very High Flow System Our GASGUARD® Very High Flow systems are the benchmark for the safe and continuous delivery of large volumes of electronic specialty gases and materials. The new VHF is our fourth generation bulk system and delivers all of the advantages of the first three generations.
GASGUARD® Acetylene Delivery Our GASGUARD Acetylene delivery system was designed for amorphous carbon hard mask (CHM) applications. For semiconductor device manufacturers in the DRAM and Flash Memory markets, the system will reduce operating costs, increase cylinder utilization, and improve both film quality and yields.
GASGUARD AP11 Controller Our GASGUARD® AP11 controller is the latest generation of control technology for specialty gas delivery systems. The AP11 provides users with enhanced uptime, simplified troubleshooting and increased controller reliability. Benefits of the AP11 controller include: Uninterrupted gas supply while controller is in use; smart indicators for simplified monitoring; and a continued focus on reliability in the design and testing processes…
GASGUARD Distribution Systems VMB-DVB Our GASGUARD® Valve Manifold Boxes (VMB) and Distribution Valve Boxes (DVB) are designed to easily interface with our GASGUARD family of products.
GASGUARD Gas Delivery Systems Our GASGUARD® product line includes automatic, semi-automatic and manual systems in a variety of configurations, from a single-source system to a three-cylinder source system and purge system. The different models can accommodate a full range of hazardous gases: flammable, pyrophoric, corrosives, toxics and highly-toxics, all tailored to meet your needs.
GCS Global Communications System Our GCS (Global Communications System) provides a facility central monitoring and control of all of the gas and chemical delivery systems installed at your facility, from a remote location.
GASGUARD Hydrogen Chloride Purification System Our GASGUARD® Hydrogen Chloride (HCl) Purification Systems, using Pall CorporationÍs purification material, can now process over 500,000 lbs. of HCl during its lifetime. According to studies done by Pall using its ñpurifier lifetime calculatorî, this is an increase of almost two times over earlier systems.
GASGUARD UHP Forming Gas Blender Our GASGUARD® UHP forming gas blender offers dynamic savings compared to traditional cylinder supply modes by delivering stable blends of 0% - 10% Hydrogen (H2), Nitrogen (N2) with blend accuracies of +/= 0.2 absolute. By blending H2 and N2 gases, the need for buying and storing cylinders is eliminated.