TYPHOON™ S790 Quartzware Cleaner The Versum Materials TYPHOON Quartzware Cleaner is a self-contained system designed to automatically clean and rinse 200 or 300mm vertical furnace quartzware in a vertical all spray process. TYPHOON offers a faster and cleaner process with improved cost-of-ownership. The tool provides two process chambers with simultaneous independent operation.
OMNI™ Quartzware Cleaner The Versum Materials OMNI Quartzware Cleaner is a self‐contained system designed to automatically clean and rinse 300mm (or smaller) vertical furnace quartzware in a vertical all spray process. OMNI features twin process chambers with engineered ﬁxturing for tubes and liners in the right chamber, and multiple ﬁxtures for all other quartz accessories in the left chamber on a rotating carousel.…
FX-30 FOUP FOSB Cleaner The Versum Materials FX-30 FOUP/FOSB Cleaner is specifically engineered for 300mm FOUPs (Front Opening Unified Pods) and FOSBs (Front Opening Supply Boxes). The use of a solution isolation technology provides superior cleaning and drying performance in a compact unit.
FLOWMASTER Chemical Delivery System The FLOWMASTER® Chemical Delivery System supplies precise blending and delivery of post-CMP rinse chemical. When integrated with the slurry delivery system the entire tool suite delivers a complete CMP chemical solution.