CHEMGUARD® Gen III Model CG350 Automated Chemical Refill System W/Opt. eV Heating NEW: The 3rd Generation of the CHEMGUARD is here! The CHEMGUARD CG350 is a dual tank liquid reﬁll (DTLR) cabinet designed for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. CHEMGUARD has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes…
Versum Materials Reaches Milestone with Installation of 200th CHEMGUARD® Gen. III Refill System TEMPE, Ariz. (January 6, 2017) – Versum Materials, Inc. (NYSE:VSM) The Delivery Systems and Services Group (DS&S) of Versum Materials, Inc. (NYSE: VSM) has realized an important milestone: the sale and commissioning of its 200th CHEMGUARD® Gen III high purity, liquid delivery system since the product line launched in early 2016. The 200 units are now running in the latest…
Trimethylphosphate Trimethylphosphate (TMPO) is a liquid phosphorus source used in depositing PSG and BPSG films for semiconductor applications. TMPO is a high purity liquid precursor used in producing high quality dielectric films.
Trimethylphosphite Trimethylphosphite (TMPI) is a liquid phosphorus source used with silicon sources such as TEOS to dope SiO2 in PSG and BPSG applications.
Trimethylsilane 3MS Semiconductor Semiconductor Grade Trimethylsilane (99.995%) is our standard high-purity offering for Low-k semiconductor applications. Trimethylsilane is a colorless, odorless, and highly-flammable gas.
VAPORGUARD Temperature Control System The VAPORGUARD® Temperature Control System is our next-generation controller that provides accurate and stable temperature control for chemicals. It is available in six different models (providing temperature control ranging from 10-115°C.)
Titanium Tetrachloride TiCl4 Titanium Tetrachloride (TiCl4) is a liquid source material for the chemical vapor Thin Film Deposition (CVD) of titanium nitride, titanium dioxide and titanium metal.
Trans-LC® Trans-LC (Trans 1,2-Dichloroethylene) is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning. It features a low toxic hazard rating and is not restricted as an ozone depleting chemical. Trans-LC provides consistent process results and is superior in performance to corrosive HCl. The use of Trans-LC is preferred over any known chlorine sources in the low-temperature…
Triethylborate Triethylborate (TEB) is a liquid boron source used for Borosilicate (BSG) and Borophosphosilicate (BPSG) glass Thin Film Deposition in low pressure, atmospheric pressure and plasma enhanced CVD systems
Triethylphosphate Triethylphosphate (TEPO) is a liquid phosphorus source used in depositing PSG and BPSG films for semiconductor applications.